Abdulazhanov S, Le QH, Huynh DK, Wang D, Gerlach G, Kämpf T.
A mmWave Phase Shifter Based on Ferroelectric Hafnium Zirconium Oxide Varactors. 2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP) [Internet]. 2019:175-177.
访问链接AbstractThis paper presents a 60 GHz phase shifter, based on a coplanar waveguide (CPW) transmission line, loaded with ferroelectric hafnium zirconium oxide (HZO) variable metal-insulator-metal (MIM) varactors, developed for the back-end-of-line (BEoL) on-chip integration. Using the measured data of capacitance-voltage (C-V) characteristics of HZO and implementing the method-of-moments simulation, it was shown, that by changing the bias voltage between 0.95 and -3 V, the device shows a phase shift of 111° and a minimum insertion loss of -5.84 dB at 60 GHz. The chip area of the device is 0.206 mm 2 , making it the smallest among non-CMOS phase shifters.
Le QH, Huynh DK, Wang D, Kämpfe T, Rudolph M.
Small-Signal Modeling of mm- Wave MOSFET up to 110 GHz in 22nm FDSOI Technology. 2019 IEEE Asia-Pacific Microwave Conference (APMC) [Internet]. 2019:222-224.
访问链接AbstractIn this paper, a comprehensive analysis on small-signal modeling of mm-wave transistor in 22nm FDSOI technology is presented. The model is constructed based on experimental S-parameters up to 110 GHz of a 22FDX® thick-oxide n-MOSFET and analytical parameter extraction approach. The non-quasi static effect is addressed thoroughly in the equivalent circuit model for high frequency validity. The bias-dependent series source and drain resistances are considered to account for the overlap regions between the gate and the highly doped source/drain regions. In addition, a simple RC network is included at the output to model the innegligible substrate coupling at mm-wave frequencies. Excellent agreements between model prediction and measurement are observed in the interested bandwidth for various bias conditions.
Abdulazhanov S, Le QH, Huynh DK, Wang D, Gerlach G, Kämpfe T.
A Tunable mmWave Band-Pass Filter Based on Ferroelectric Hafnium Zirconium Oxide Varactors. 2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP) [Internet]. 2019:46-48.
访问链接AbstractThis paper presents a tunable 60 GHz band-pass filter, based on a coplanar waveguide (CPW) transmission line, periodically loaded with ferroelectric Hafnium Zirconium Oxide (HZO) variable metal-ferroelectric-metal (MIM) capacitors (varactors), developed for back-end-of-line (BEoL) integration. Derived from the nonlinear capacitance of hafnium zirconium oxide and implementing the method-of-moments simulation, it was shown, that with changing the bias voltage between 0.95 and -3 V, the filter’s center frequency can be tuned between 60.5 and 69,7 GHz, respectively. Hereby, a minimum insertion loss of -3.3 dB is realized. The chip area of the filter is only 0.062 mm 2 , making it the smallest among tunable V-band filters.