High-density heteroepitaxial diamond nucleation on biased mirror-polished Si(100) in hot filament chemical vapor deposition

Citation:

Chen F, Chen Y, Wang E-G. High-density heteroepitaxial diamond nucleation on biased mirror-polished Si(100) in hot filament chemical vapor deposition. Proceedings of SPIE - The International Society for Optical Engineering. 1996:225-231.