Controlled fabrication of nano-scale wrinkle structure by fluorocarbon plasma on pre-strain membranes

Citation:

Cheng X, Miao L, Su Z, Chen H, Song Y, Chen X, Zhang H. Controlled fabrication of nano-scale wrinkle structure by fluorocarbon plasma on pre-strain membranes. Microsystems & Nanoengineering. 2016;2:16074.