@article {20098,
	title = {Controlled fabrication of nano-scale wrinkle structure by fluorocarbon plasma on pre-strain membranes},
	journal = {Microsystems \&amp; Nanoengineering},
	volume = {2},
	year = {2016},
	pages = {16074},
	author = {Cheng, X and Miao, L and Su, Z and Chen, H. and Y. Song and X. Chen and H. Zhang}
}
