A 3-D Stacked high-Q PI-based MEMS inductor for wireless power transmission system in bio-implanted applications

Citation:

Sun X, Peng X, Zheng Y, Li X, Zhang H. A 3-D Stacked high-Q PI-based MEMS inductor for wireless power transmission system in bio-implanted applications. J. Microelectromech. Syst. 2014;23:888-898.