Publications Papers

2012
Zhu F-Y, Di Q-L, Zeng X-J, Zhang X-S, Zhao X, Zhang H-X. Surface analysis and process optimization of black silicon. Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. 2012:567-570.
Zhang SH, Yuan Q, Han MD, Zhang HX. Fabrication and Simulation of a Novel 3D Flexible Electromagnetic Energy Generator. Digest Tech. Papers PowerMEMS 2012 Workshop 2012. 2012:315-318.
Zhang X-S, Zhu F-Y, Zhang H-X. Formation and interaction of micro/nano multi-scale structures. Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. 2012:445-448.
Sun X, Zheng Y, Li Z, Yu M, Yuan Q, Li X, Zhang H. Design and fabrication of flexible parylene-based inductors with electroplated NiFe magnetic core for wireless power transmission system. Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on. 2012:238-242.
Tang W, Meng B, Su W, Zhang HX. Investigation of silicon/glass anodic bonding with PECVD silicon carbide as the intermediate layer. Journal of Micromechanics and Microengineering. 2012;22(9):095011.
Peter NJ, Zhang X-S, Chu S-G, Zhu F-Y, Seidel H, Zhang H-X. Tunable wetting behavior of nanostructured poly (dimethylsiloxane) by plasma combination treatments. Applied Physics Letters. 2012;101(22):221601.
Zhang X, Zhu FY, Sun GY, Zhang H. Fabrication and characterization of squama-shape micro/nano multi-scale silicon material. Science China Technological Sciences. 2012;55(12):3395-3400.
Li X, Yuan Q, Yang T, Liu J, Zhang H. Magnetic energy coupling system based on micro-electro-mechanical system coils. Journal of Applied Physics. 2012;111(7):07E734.
Sun X, Yuan Q, Fang D, Zhang H. Electrodeposition and characterization of CoNiMnP permanent magnet arrays for MEMS sensors and actuators. Sensors and Actuators A: Physical. 2012;188:190-197.

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