十二月 21, 2023
On the afternoon of December 21, 2023, Professor Kanno from Kobe University in Japan visited and exchanged ideas, and gave a lecture on Piezoelectric thin films for MEMS to his classmates. Professor Kanno mainly introduced Piezoelectric MEMS applications, Deposition of PZT thin films, Characterization of the Piezoelectric thin films, and Recent attacks at Piezoelectric thin films. Through this exchange, students have gained a more comprehensive understanding of piezoelectric MEMS.