Welcome Qing'an Huang to visit Peking University and give a talk!

十月 12, 2023

On the afternoon of October 12th at 14:00, Professor Huang Qing'an from Southeast University presented a report with the theme of "MEMS Technology and Industrial Development". The lecture is hosted by Associate Professor Lu Yipeng from the School of Integrated Circuits. More than 340 people participated in total. In the report, Professor Huang Qing'an introduced four aspects: semiconductor device milestones, MEMS milestones, trends, and challenges. This article introduces the development of MEMS technology and industry over time, and analyzes why research in the United States is both original and capable of producing high-tech products from the perspective of MEMS development. Continuing to elaborate on the milestones in semiconductor device manufacturing, including microelectronics, optoelectronics, and MEMS, MEMS devices such as resistive pressure sensors and resonant gate transistors have changed the way humans perceive and control the external world. Next, Professor Huang talked about the applications of MEMS devices, such as piezoelectric MEMS, which can be used for ultrasound ranging, fingerprint sensing, ultrasound medical imaging, etc; Digital mirrorless devices enable movies to transition from film to the digital age; And microwave switches, RF MEMS, grating light modulators, infrared sensors, acceleration sensors, and so on. And analyzed the common mistakes and reference points that makers often make in the MEMS and sensing industries. NovaSensor, as a startup company, is changing lanes to overtake and applying new technology wafer bonding to MEMS pressure sensors; Double sided lithography has alignment errors and a long etching time on the back, resulting in silicon migration technology and epitaxial single-crystal silicon on porous silicon. Finally, Professor Huang presented trends and challenges in the report. For the trend, key technical elements were emphasized: miniaturization, integration, networking, and intelligence. For challenges: Firstly, in terms of market and manufacturing, China is a major consumer in the market, with a small share in manufacturing; The second is the technology chain, but a certain step is particularly good and cannot meet the requirements of the production line. At the end of the report, Professor Huang mentioned in his summary that original ideas and high-tech products are problem oriented, inspired by life observations and new discoveries made through experimental anomalies. We must become the first discoverers of scientific laws, the first creators of technological inventions, the first pioneers of innovative industries, and the first practitioners of innovative concepts.