Erratum: Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors (Appl. Phys. Lett. (2002) 80 (1580))

Citation:

Shen T-C, Ji J-Y, Zudov MA, Du R-R, Kline JS, Tucker JR. Erratum: Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors (Appl. Phys. Lett. (2002) 80 (1580)). Applied Physics Letters. 2002;(17):3231-.