@article {8640,
	title = {Erratum: Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors (Appl. Phys. Lett. (2002) 80 (1580))},
	journal = {Applied Physics Letters},
	year = {2002},
	pages = {3231-},
	doi = {10.1063/1.1476066},
	author = {T.-C. Shen and J.-Y. Ji and M.A. Zudov and R.-R. Du and J.S. Kline and J.R. Tucker}
}
