Equipment in our lab(实验室建有全中国最大最全、技术世界并跑的芯片热测试平台,其中一半设备自己搭建,一半设备采购改装):
1. Time-domain thermoreflectance(TDTR): two-color TDTR with femtosecond laser(时域热反射)
2. Time-domain thermoreflectance (TDTR): two-tint TDTR with femtosecond laser(时域热反射)
3. Steady-state thermoreflectance: SSTR (稳态热反射)
4. Micro-Raman system for temperature and stress measurements
5. QFI infrared microscopy 显微红外测温
6. Microsanj 热反射测温,50纳秒的瞬态温度测量
7. Thermoreflectance device thermometry
8. Instec cryogenic chamber
9. Beam-offset setup for TDTR
10. Optical microscope
11. High-resolution mapping stages up to 1 nm step resolution
12. Probe station
Shared equipment:
1. CVD Diamond growth equipment
2. Surface activated bonding machine
3. High vacuum PVD metal deposition
4. TEM and EELS
5. We have excellent clean room facilities in our school
