Equipment

Equipment in our lab(实验室建有全中国最大最全、技术世界并跑的芯片热测试平台,其中一半设备自己搭建,一半设备采购改装):

1. Time-domain thermoreflectance(TDTR): two-color TDTR with femtosecond laser(时域热反射)

2. Time-domain thermoreflectance (TDTR): two-tint TDTR with femtosecond laser(时域热反射)

3. Steady-state thermoreflectance: SSTR (稳态热反射)

4. Micro-Raman system for temperature and stress measurements 

5. QFI infrared microscopy 显微红外测温

6. Microsanj 热反射测温,50纳秒的瞬态温度测量

7. Thermoreflectance device thermometry

8. Instec cryogenic chamber

9. Beam-offset setup for TDTR

10. Optical microscope

11. High-resolution mapping stages up to 1 nm step resolution

12. Probe station

Shared equipment:

1. CVD Diamond growth equipment

2. Surface activated bonding machine

3. High vacuum PVD metal deposition

4. TEM and EELS

5. We have excellent clean room facilities in our school