This article presents a capacitively coupled voltage-controlled oscillator (VCO)-based sensor readout featuring a hybrid phase-locked loop (PLL)-ΔΣ modulator structure. It leverages phase-locking and phase-frequency detector (PFD) array to concurrently perform quantization and dynamic element matching (DEM), much-reducing hardware/power compared with the existing VCO-based readouts' counting scheme. A low-cost in-cell data-weighted averaging (DWA) scheme is presented to enable a highly linear tri-level digital-to-analog converter (DAC). Fabricated in 40-nm CMOS, the prototype readout achieves 78-dB SNDR in 10-kHz bandwidth, consuming 4.68 μW and 0.025-mm2 active area. With 172-dB Schreier figure of merit, its efficiency advances the state-of-the-art VCO-based readouts by 50×.
This article presents a second-order noise-shaping (NS) successive approximation register (SAR) analog-to-digital converter (ADC) with a process, voltage, and temperature (PVT)-robust closed-loop dynamic amplifier. The proposed closed-loop dynamic amplifier combines the merits of closed-loop architecture and dynamic operation, realizing robustness, high accuracy, and high energy-efficiency simultaneously. It is embedded in the loop filter of an NS SAR design, enabling the first fully dynamic NS-SAR ADC that realizes sharp noise transfer function (NTF) while not requiring any gain calibration. Fabricated in 40-nm CMOS technology, the prototype ADC achieves an SNDR of 83.8 dB over a bandwidth of 625 kHz while consuming only 107 μW. It results in an SNDR-based Schreier figure-of-merit (FoM) of 181.5 dB.