@article {40342,
	title = {High Thermal Conductivity in Back-End-of-Line Compatible AlN Thin Films},
	journal = {arXiv preprint arXiv:2603.07115},
	year = {2026},
	author = {Guo, Xufei and Chen, Zirou and Huang, Zifeng and Wang, Yuxiang and Liu, Jinwen and Cheng, Zhe}
}
