@article {32994,
	title = {Bulk-like intrinsic phonon thermal conductivity of micrometer thick AlN films},
	journal = {ACS Applied Materials \&amp; Interfaces},
	volume = {12},
	year = {2020},
	pages = {29443{\textendash}29450},
	publisher = {American Chemical Society},
	author = {Koh, Yee Rui and Cheng, Zhe and Mamun, Abdullah and Bin Hoque, Md Shafkat and Liu, Zeyu and Bai, Tingyu and Hussain, Kamal and Liao, Michael E and Li, Ruiyang and Gaskins, John T}
}
