%0 Journal Article %J Review of Scientific Instruments %D 2006 %T A double-stage pulsed discharge fluorine atom beam source %A Zefeng Ren %A Minghui Qiu %A Li Che %A Dongxu Dai %A Xiuyan Wang %A Xueming Yang %B Review of Scientific Instruments %P 1-3 %G eng %N 1 %] 000234979400038 %R 10.1063/1.2140338