@article {4689, title = {A double-stage pulsed discharge fluorine atom beam source}, journal = {Review of Scientific Instruments}, year = {2006}, pages = {1-3}, doi = {10.1063/1.2140338}, author = {Zefeng Ren and Minghui Qiu and Li Che and Dongxu Dai and Xiuyan Wang and Xueming Yang} }