@article {4689,
	title = {A double-stage pulsed discharge fluorine atom beam source},
	journal = {Review of Scientific Instruments},
	year = {2006},
	pages = {1-3},
	doi = {10.1063/1.2140338},
	author = {Zefeng Ren and Minghui Qiu and Li Che and Dongxu Dai and Xiuyan Wang and Xueming Yang}
}
