@conference {li2022beol,
	title = {{BEOL-Compatible High-Performance a-IGZO Transistors with Record high I ds},
	booktitle = {2022 International Electron Devices Meeting (IEDM)},
	year = {2022},
	pages = {2{\textendash}7},
	publisher = {IEEE},
	organization = {IEEE},
	author = {Li, Qijun and Gu, Chengru and Zhu, Shenwu and Hu, Qianlan and Zhao, Wenjie and Li, Xuefei and Ru HUANG and Wu, Yanqing}
}
