@article {wang2021performance,
	title = {Performance optimization of atomic layer deposited ZnO thin-film transistors by vacuum annealing},
	journal = {IEEE Electron Device Letters},
	volume = {42},
	number = {5},
	year = {2021},
	pages = {716{\textendash}719},
	publisher = {IEEE},
	author = {Wang, Mengfei and Zhan, Dan and Xin Wang and Hu, Qianlan and Gu, Chengru and Li, Xuefei and Wu, Yanqing}
}
