@conference {li2019beol,
	title = {BEOL compatible 15-nm channel length ultrathin indium-tin-oxide transistors with I on= 970 $μ$A/$μ$m and on/off ratio near 10 11 at V ds= 0.5 V},
	booktitle = {2019 IEEE International Electron Devices Meeting (IEDM)},
	year = {2019},
	pages = {3{\textendash}5},
	publisher = {IEEE},
	organization = {IEEE},
	author = {Li, Shengman and Tian, Mengchuan and Gu, Chengru and Runsheng WANG and Wang, Mengfei and Xiong, Xiong and Li, Xuefei and Ru HUANG and Wu, Yanqing}
}
