@book {RN72,
	title = {First Experimental Demonstration of 100 nm Inversion-mode In GaAs FinFET through Damage-free Sidewall Etching},
	series = {2009 Ieee International Electron Devices Meeting},
	year = {2009},
	pages = {304-+},
	type = {Book},
	isbn = {978-1-4244-5639-0},
	url = {\&lt;Go to ISI\&gt;://WOS:000279343900076},
	author = {Wu, Y. Q. and Wang, R. S. and Shen, T. and Gu, J. J. and Ye, P. D. and Ieee}
}
