I mainly carry out research on the design, processing and system integration of piezoelectric MEMS, ultrasonic MEMS, sensors and actuators. Among them, I made original, systematic and breakthrough contributions to the mechanism, key process, micro system integration and industrialization of piezoelectric micro ultrasonic sensor (PMUT), realized the CMOS integrated PMUT array, and applied it to ultrasonic fingerprint identification sensors. The core technology patents were purchased and industrialized by leading companies in the industry. The world's first micro ultrasonic fingerprint sensor chip, led by Qualcomm's Advanced Technology Research and Development Department, has achieved mass production and shipped more than hundreds of millions.
So far, I have published 37 articles in the top journals (JMEMS, JSSC, TUFFC, APL, etc.) and conferences (MEMS, ISSCC, Transducers, IUS, etc.) in the field of integrated micro nano systems and sensors. I have 32 U.S. patents (more than 20 of which have been transferred or formed products and mass produced), one English book chapter, and won important awards for many times, including the best paper of MEMS, ISSCC conferences, the BEST of BSAC, Super Qualcomm Star, etc.In addition, I serve as Associate Editor of IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control (UFFC), a member of the Top Conference Solid-State Sensors, Actuators and Microsystems (Hilton Head) 2022 Technical Committee, IEEE SFBA Member of MEMS & Sensor Chapter Committee (2016-2022).
We will recruit postdocs, doctors, masters, and undergraduates in MEMS, sensors and actuators, and integrated micro-nano systems for a long time. If you are interested in our research direction, you are welcome to send your resume and other information to yplu@pku.edu.cn.
http://scholar.pku.edu.cn/yplu