@article {33260,
	title = {Adapting aluminum-doped zinc oxide for electrically conductive membranes fabricated by atomic layer deposition},
	journal = {ACS applied materials \&amp; interfaces},
	volume = {12},
	year = {2019},
	pages = {963-969},
	publisher = {American Chemical Society},
	isbn = {1944-8244},
	author = {Yang, Wulin and Son, Moon and Rossi, Ruggero and Vrouwenvelder, Johannes S and Logan, Bruce E.}
}
