@article {yang2019adapting,
	title = {Adapting aluminum-doped zinc oxide for electrically conductive membranes fabricated by atomic layer deposition},
	journal = {ACS Applied Materials \&amp; Interfaces},
	volume = {12},
	number = {1},
	year = {2019},
	pages = {963{\textendash}969},
	publisher = {American Chemical Society},
	author = {Yang, Wulin and Son, Moon and Rossi, Ruggero and Vrouwenvelder, Johannes S and Logan, Bruce E.}
}
