@article {yang2019adapting,
	title = {Adapting Aluminum-Doped Zinc Oxide for Electrically Conductive Membranes Fabricated by Atomic Layer Deposition},
	journal = {ACS applied materials \&amp; interfaces},
	volume = {12},
	number = {1},
	year = {2019},
	pages = {963{\textendash}969},
	publisher = {American Chemical Society},
	author = {Yang, Wulin and Son, Moon and Rossi, Ruggero and Vrouwenvelder, Johannes S and Logan, Bruce E.}
}
