@article {9511640,
	title = {A Miniature Ionization Vacuum Sensor With a SiOₓ-Based Tunneling Electron Source},
	journal = {IEEE Transactions on Electron Devices},
	volume = {68},
	number = {10},
	year = {2021},
	pages = {5127-5132},
	doi = {10.1109/TED.2021.3102089},
	author = {Wei Yang and Liu, Wenchao and Xun Wang and Zhiwei Li and Fangyuan Zhan and Zhang, Gengmin and Wei, Xianlong}
}
