@article {9199409,
	title = {Wafer-Scale Fabricated On-Chip Thermionic Electron Sources With an Integrated Extraction Gate},
	journal = {IEEE Transactions on Electron Devices},
	volume = {67},
	number = {11},
	year = {2020},
	month = {Nov},
	pages = {5132-5137},
	abstract = {Thermionic electron sources are scaled down to the microscale on a chip and batch fabricated on 4-in silicon wafers by utilizing microfabrication technologies and exploiting carbon nanotubes as microscopic filaments of thermionic electron emission. The microfabricated on-chip thermionic electron sources not only satisfy the metrics of compactness and ease of batch fabrication, but also exhibit the advantages of good performance reproducibility ({\textpm}6.9\% variation over 100 test cycles under a driven voltage of 3.5 V) and high emission stability (fluctuation \&lt; 5\% for emission current level of ≈10-8 A over 900 s) under a relatively low vacuum condition (10-4{\textendash}10-2 Pa). Furthermore, to extract electrons and tune emission current, an extraction gate with a mesh is monolithically integrated with the thermionic electron sources using anodic bonding technique. The integrated electron sources exhibit a strong gate controllability and a considerable electron transmission ratio of ≈76\% through the extraction gate. All these results make our devices a promising type of on-chip electron source in the applications of miniature vacuum electronic devices/systems.},
	keywords = {Carbon nanotube, Carbon nanotubes, electron sources, Logic gates, microfabrication, on-chip electron source, System-on-chip, thermionic electron source, thermionic emission},
	issn = {1557-9646},
	doi = {10.1109/TED.2020.3021627},
	author = {Y. Wang and Liu, W. and L. Xiang and Zhao, Z. and Z. Li and Yang, W. and D. Zhou and P Liu and X. Wei}
}
