@article {doi:10.1002/adfm.201907814,
	title = {High-Performance On-Chip Thermionic Electron Micro-Emitter Arrays Based on Super-Aligned Carbon Nanotube Films},
	journal = {Advanced Functional Materials},
	volume = {30},
	number = {n/a},
	year = {2020},
	pages = {1907814},
	abstract = {Abstract An important advancement towards the realization of miniaturized and fully integrated vacuum electronic devices will be the development of on-chip integrated electron sources with stable and reproducible performances. Here, the fabrication of high-performance on-chip thermionic electron micro-emitter arrays is demonstrated by exploiting suspended super-aligned carbon nanotube films as thermionic filaments. For single micro-emitter, an electron emission current up to ≈20 {\textmu}A and density as high as ≈1.33 A cm-2 are obtained at a low-driven voltage of 3.9 V. The turn-on/off time of a single micro-emitter is measured to be less than 1 {\textmu}s. Particularly, stable ({\textpm}1.2\% emission current fluctuation for 30 min) and reproducible ({\textpm}0.2\% driven voltage variation over 27 cycles) electron emission have been experimentally observed under a low vacuum of ≈5 {\texttimes} 10-4 Pa. Even under a rough vacuum of ≈10-1 Pa, an impressive reproducibility ({\textpm}2\% driven voltage variation over 20 cycles) is obtained. Moreover, emission performances of micro-emitter arrays are found to exhibit good uniformity. The outstanding stability, reproducibility, and uniformity of the thermionic electron micro-emitter arrays imply their promising applications as on-chip integrated electron sources.},
	keywords = {aligned carbon nanotube, On-chip, thermionic electron emitter},
	doi = {10.1002/adfm.201907814},
	url = {https://onlinelibrary.wiley.com/doi/abs/10.1002/adfm.201907814},
	author = {Yuwei Wang and Li Xiang and Wei Yang and Zhiwei Li and Fang, Zheng and Zhou, Duanliang and Liu, Peng and Wei, Xianlong}
}
