@article {39874,
	title = {High quality AlN with uniform in-plane strain on nano-patterned AlN templates achieved by preset strain modulation},
	journal = {Japanese Journal of Applied Physics},
	volume = {60},
	year = {2021},
	pages = {120903},
	author = {Baiyin Liu and Xu, Fujun and Wang, Jiaming and Jing Lang and Na Zhang and Xuzhou Fang and Liubing Wang and Yang, Xuelin and Xiangning Kang and Wang, Xinqiang and Qin, Zhixin and Ge, Weikun and Shen, Bo}
}
