@article {39873,
	title = {Correlation between electrical properties and growth dynamics for Si-doped Al-rich AlGaN grown by metal-organic chemical vapor deposition},
	journal = {Micro and Nanostructures},
	volume = {163},
	year = {2022},
	pages = {107141},
	author = {Baiyin Liu and Xu, Fujun and Wang, Jiaming and Jing Lang and Liubing Wang and Xuzhou Fang and Yang, Xuelin and Xiangning Kang and Wang, Xinqiang and Qin, Zhixin and Ge, Weikun and Shen, Bo}
}
