@article {39864,
	title = {Improving electrical properties of metal-semiconductor contact on Al-rich n-AlGaN by multi-step annealing},
	journal = {Applied Physics Letters},
	volume = {127},
	year = {2025},
	pages = {172104},
	author = {Xueqi Guo and Jing Lang and Xu, Fujun and Wang, Jiaming and Zhang, Lisheng and Ziyao Zhang and Chen Ji and Fuyun Tan and Chengzhi Ji and Xiangning Kang and Yang, Xuelin and Tang, Ning and Wang, Xinqiang and Ge, Weikun and Shen, Bo}
}
