@article {39859,
	title = {Elimination of spiral hillocks in AlGaN grown on high-temperature annealed AlN templates by adopting an AlN/AlGaN stress modulation multilayer},
	journal = {Applied Physics Letters},
	volume = {124},
	year = {2024},
	pages = {062103},
	author = {Xuzhou Fang and Wang, Jiaming* and Xu, Fujun* and Zhang, Lisheng and Jing Lang and Ziyao Zhang and Fuyun Tan and Yang, Xuelin and Xiangning Kang and Qin, Zhixin and Tang, Ning and Wang, Xinqiang and Ge, Weikun and Shen, Bo}
}
