@article {39857,
	title = {Control of dislocations in heteroepitaxial AlN films by extrinsic supersaturated vacancies introduced through thermal desorption of heteroatoms},
	journal = {Applied Physics Letters},
	volume = {118},
	year = {2021},
	pages = {162103},
	author = {Wang, Jiaming and Xu, Fujun and Baiyin Liu and Jing Lang and Na Zhang and Xiangning Kang and Qin, Zhixin and Yang, Xuelin and Wang, Xinqiang and Ge, Weikun and Shen, Bo}
}
