@article {39856,
	title = {Sub-nanometer ultrathin epitaxy of AlGaN and its application in efficient doping},
	journal = {Light: Science \&amp; Applications},
	volume = {11},
	year = {2022},
	pages = {71},
	author = {Wang, Jiaming and Mingxing Wang and Xu, Fujun and Baiyin Liu and Jing Lang and Na Zhang and Xiangning Kang and Qin, Zhixin and Yang, Xuelin and Wang, Xinqiang and Ge, Weikun and Shen, Bo}
}
