<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">T.-C. Shen</style></author><author><style face="normal" font="default" size="100%">J.-Y. Ji</style></author><author><style face="normal" font="default" size="100%">M.A. Zudov</style></author><author><style face="normal" font="default" size="100%">R.-R. Du</style></author><author><style face="normal" font="default" size="100%">J.S. Kline</style></author><author><style face="normal" font="default" size="100%">J.R. Tucker</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors</style></title><secondary-title><style face="normal" font="default" size="100%">Applied Physics Letters</style></secondary-title></titles><dates><year><style  face="normal" font="default" size="100%">2002</style></year></dates><pages><style face="normal" font="default" size="100%">1580-1582</style></pages><language><style face="normal" font="default" size="100%">eng</style></language><issue><style face="normal" font="default" size="100%">9</style></issue><custom7><style face="normal" font="default" size="100%">000174181400026</style></custom7></record></records></xml>