@article {8639,
	title = {Ultradense phosphorous delta layers grown into silicon from PH3 molecular precursors},
	journal = {Applied Physics Letters},
	year = {2002},
	pages = {1580-1582},
	doi = {10.1063/1.1456949},
	author = {T.-C. Shen and J.-Y. Ji and M.A. Zudov and R.-R. Du and J.S. Kline and J.R. Tucker}
}
