@article {8620,
	title = {Nanoscale electronics based on two-dimensional dopant patterns in silicon},
	journal = {Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures},
	year = {2004},
	pages = {3182-3185},
	doi = {10.1116/1.1813466},
	author = {T.-C. Shen and J.S. Kline and T. Schenkel and S.J. Robinson and J.-Y. Ji and C. Yang and R.-R. Du and J.R. Tucker}
}
