@article {rong2016residual,
	title = {Residual stress in AlN films grown on sapphire substrates by molecular beam epitaxy},
	journal = {Superlattices and Microstructures},
	volume = {93},
	year = {2016},
	pages = {27{\textendash}31},
	publisher = {Elsevier},
	url = {https://www.sciencedirect.com/science/article/pii/S0749603616300933},
	author = {Rong, Xin and Wang, Xinqiang and Chen, Guang and Pan, Jianhai and Wang, Ping and Liu, Huapeng and Xu, Fujun and Pingheng Tan and Shen, Bo}
}
