<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Hui Sun</style></author><author><style face="normal" font="default" size="100%">Wang, Maojun</style></author><author><style face="normal" font="default" size="100%">Jianguo Chen</style></author><author><style face="normal" font="default" size="100%">Liu, Peng</style></author><author><style face="normal" font="default" size="100%">Kuang, Wenteng</style></author><author><style face="normal" font="default" size="100%">Meihua Liu</style></author><author><style face="normal" font="default" size="100%">Hao, Yilong</style></author><author><style face="normal" font="default" size="100%">Dongmin Chen</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Fabrication of High-Uniformity and High-Reliability Si3N4/AlGaN/GaN MIS-HEMTs With Self-Terminating Dielectric Etching Process in a 150-mm Si Foundry</style></title><secondary-title><style face="normal" font="default" size="100%">IEEE TRANSACTIONS ON ELECTRON DEVICES</style></secondary-title></titles><keywords><keyword><style  face="normal" font="default" size="100%">AlGaN/GaN</style></keyword><keyword><style  face="normal" font="default" size="100%">damage-free etching</style></keyword><keyword><style  face="normal" font="default" size="100%">early dielectric</style></keyword><keyword><style  face="normal" font="default" size="100%">metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs)</style></keyword><keyword><style  face="normal" font="default" size="100%">self-terminating</style></keyword><keyword><style  face="normal" font="default" size="100%">Si compatibility</style></keyword><keyword><style  face="normal" font="default" size="100%">uniformity</style></keyword></keywords><dates><year><style  face="normal" font="default" size="100%">2018</style></year><pub-dates><date><style  face="normal" font="default" size="100%">NOV</style></date></pub-dates></dates><number><style face="normal" font="default" size="100%">11</style></number><publisher><style face="normal" font="default" size="100%">IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC</style></publisher><pub-location><style face="normal" font="default" size="100%">445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA</style></pub-location><volume><style face="normal" font="default" size="100%">65</style></volume><pages><style face="normal" font="default" size="100%">4814-4819</style></pages><language><style face="normal" font="default" size="100%">eng</style></language><abstract><style face="normal" font="default" size="100%">A novel early gate dielectric AIGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors (MIS-HEMTs) process is reported. With the highquality Si3N4 dielectric by low-pressure chemical vapor deposition and damage free, self-terminating passivation layer etching at the gate area, the MIS-HEMTs on 150-mm Si substrate demonstrate excellent output performance and good uniformity. The interface trap density between the gate insulator and the barrier layer is as low as 2 x 10(12) cm(-2).eV(-1) extracted by the conductance method. The MIS-HEMT fabricated on the wafer delivers an extremely small gate leakage current of 10(-9) mA/mm and a high I-on/I-off ratio of 10(11). The subthreshold swing (SS) is around 80 mV/dec, and the saturated output current density is 750 mA/mm. The dynamic on-resistance increases about 42% at a quiescent drain bias of 600 V. The V-th shift is -0.63 and -0.89 V at a high temperature of 200 degrees C and negative gate-bias stress of -25 V, respectively, indicating a comparable stability with the state-of-the-art MIS-HEMTs. An excellent threshold voltage and SS uniformity (1 - sigma/mu) with the value of 94.5% and 95.2% are achieved on the 150-mm wafer.</style></abstract><work-type><style face="normal" font="default" size="100%">Article</style></work-type><custom7><style face="normal" font="default" size="100%">000448030000011</style></custom7></record></records></xml>