<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>17</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Tang, Kechao</style></author><author><style face="normal" font="default" size="100%">Roy Winter</style></author><author><style face="normal" font="default" size="100%">Zhang, Liangliang</style></author><author><style face="normal" font="default" size="100%">Ravi Droopad</style></author><author><style face="normal" font="default" size="100%">Moshe Eizenberg</style></author><author><style face="normal" font="default" size="100%">Paul C. McIntyre</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Border trap reduction in Al&lt;sub&gt;2&lt;/sub&gt;O&lt;sub&gt;3&lt;/sub&gt;/InGaAs gate stacks</style></title><secondary-title><style face="normal" font="default" size="100%">Applied Physics Letters</style></secondary-title></titles><keywords><keyword><style  face="normal" font="default" size="100%">&amp;quot;alumina</style></keyword><keyword><style  face="normal" font="default" size="100%">annealing</style></keyword><keyword><style  face="normal" font="default" size="100%">atomic layer deposition</style></keyword><keyword><style  face="normal" font="default" size="100%">Desorption</style></keyword><keyword><style  face="normal" font="default" size="100%">gallium arsenide</style></keyword><keyword><style  face="normal" font="default" size="100%">III-V semiconductors</style></keyword><keyword><style  face="normal" font="default" size="100%">indium compounds</style></keyword><keyword><style  face="normal" font="default" size="100%">thin films&amp;quot;</style></keyword></keywords><dates><year><style  face="normal" font="default" size="100%">2015</style></year></dates><urls><web-urls><url><style face="normal" font="default" size="100%">https://aip.scitation.org/doi/abs/10.1063/1.4936100</style></url></web-urls></urls><number><style face="normal" font="default" size="100%">20</style></number><volume><style face="normal" font="default" size="100%">107</style></volume><pages><style face="normal" font="default" size="100%">202102</style></pages><language><style face="normal" font="default" size="100%">eng</style></language></record></records></xml>