@conference {11353662,
	title = {A BEOL FeFET based Multi-bit ACiM Macro with High Accuracy and Throughput via Device-Array-System Co-Optimization for Edge LM},
	booktitle = {2025 IEEE International Electron Devices Meeting (IEDM)},
	year = {2025},
	pages = {1-4},
	keywords = {accuracy, Current measurement, FeFETs, Programming, Reliability, Robustness, Throughput, Topology, Training, Weight measurement},
	doi = {10.1109/IEDM50572.2025.11353662},
	author = {Zhu, Runteng and Ning, Zhiyuan and Shao, Hanyong and Dai, Guangnan and Xu, Xiaojian and Yao, Wenshuai and Zhou, Yuejia and Huang, Weiqin and Yu, Mingxiang and Sun, Chuanlin and Qi, Siyuan and Yang, Jinghao and Luo, Wenpu and Liu, Zhiqi and Dong, Junchen and Zhang, Yihan and Tang, Kechao and Ru HUANG}
}
