@conference {11041435,
	title = {Decoupling Polarization and Trap Charges by Direct Vmid Measurement for Insights into Dynamic Mechanisms of MFMIS-FeFET},
	booktitle = {2025 9th IEEE Electron Devices Technology \&amp; Manufacturing Conference (EDTM)},
	year = {2025},
	pages = {1-3},
	keywords = {Charge measurement, FeFET dynamics decoupling, FeFETs, Frequency dependence, Guidelines, Logic gates, Manufacturing, MFMIS-FeFET, Optimization, Switches, Voltage measurement, Writing},
	doi = {10.1109/EDTM61175.2025.11041435},
	author = {Luo, Wenpu and Zhu, Runteng and Shao, Hanyong and Zhou, Yuejia and Ru HUANG and Tang, Kechao}
}
