<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>10</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">E.G. Wang</style></author><author><style face="normal" font="default" size="100%">Cheng-Zhang Wang</style></author><author><style face="normal" font="default" size="100%">Changfeng Chen</style></author><author><style face="normal" font="default" size="100%">Yan Chen</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">Structural characterization of crystalline Si-C-N films</style></title><secondary-title><style face="normal" font="default" size="100%">Materials Research Society Symposium - Proceedings</style></secondary-title></titles><dates><year><style  face="normal" font="default" size="100%">1997</style></year></dates><pages><style face="normal" font="default" size="100%">301-306</style></pages><language><style face="normal" font="default" size="100%">eng</style></language></record></records></xml>