@article {10620,
	title = {Aligned 1D silicon nanostructure arrays by plasma etching},
	journal = {Science and Technology of Advanced Materials},
	year = {2005},
	pages = {804-808},
	doi = {10.1016/j.stam.2005.05.015},
	author = {X.D. Bai and Zhi Xu and S. Liu and E.G. Wang}
}
