@article {10519,
	title = {Influence of deposition condition and hydrogen on amorphous-to-polycrystalline SiCN films},
	journal = {Thin Solid Films},
	year = {1999},
	pages = {114-121},
	doi = {10.1016/S0040-6090(99)00020-6},
	author = {Zheng Gong and E.G. Wang and G.C. Xu and Yan Chen}
}
