@proceedings {37392,
	title = {A Tunable mmWave Band-Pass Filter Based on Ferroelectric Hafnium Zirconium Oxide Varactors},
	journal = {2019 IEEE MTT-S International Microwave Workshop Series on Advanced Materials and Processes for RF and THz Applications (IMWS-AMP)},
	year = {2019},
	pages = {46-48},
	publisher = {IEEE},
	address = {Bochum, Germany},
	abstract = {This paper presents a tunable 60 GHz band-pass filter, based on a coplanar waveguide (CPW) transmission line, periodically loaded with ferroelectric Hafnium Zirconium Oxide (HZO) variable metal-ferroelectric-metal (MIM) capacitors (varactors), developed for back-end-of-line (BEoL) integration. Derived from the nonlinear capacitance of hafnium zirconium oxide and implementing the method-of-moments simulation, it was shown, that with changing the bias voltage between 0.95 and -3 V, the filter{\textquoteright}s center frequency can be tuned between 60.5 and 69,7 GHz, respectively. Hereby, a minimum insertion loss of -3.3 dB is realized. The chip area of the filter is only 0.062 mm\&nbsp;2\&nbsp;, making it the smallest among tunable V-band filters.},
	url = {https://ieeexplore.ieee.org/abstract/document/8880098},
	author = {Sukhrob Abdulazhanov and Quang Huy Le and Dang Khoa Huynh and Defu Wang and Gerald Gerlach and Thomas K{\"a}mpfe}
}
