@article {31777,
	title = {Towards a Fully Integrated sub-THz MicrofluidicSensor Platform for Dielectric Spectroscopy},
	journal = {Frequenz},
	volume = {76 },
	year = {2022},
	abstract = {Dielectric spectroscopy in the sub-THz regime is a promising candidate for microfluidic-based analysis of biological cells and bio-molecules, since multiple vibrational and rotational transition energy levels exist in this frequency range (P. Siegel, {\textquotedblleft}Terahertz technology in biology and medicine,{\textquotedblright}\&nbsp;IEEE Trans. Microw. Theor. Tech., vol. 52, pp. 2438{\textendash}2447, 2004). This article presents our recent efforts in the implementation of microfluidic channel networks with silicon-based technologies to unleash the potential of an integrated sub-THz microfluidic sensor platform. Various aspects of dielectric sensors, readout systems, flowmeter design as well as implemention- and technology-related questions are addressed. Three dielectric sensor systems are presented operating at 240\&nbsp;GHz realizing transmission-based, reflection-based and full two-port architectures. Furthermore different silicon based microchannel integration techniques are discussed as well as a novel copper pillar-based PCB microchannel method is proposed and successfully demonstrated.},
	url = {https://doi.org/10.1515/freq-2022-0091},
	author = {Carl Heine and Emre Can Durmaz and Defu Wang and Zhibo Wang and Matthias Wietstruck and Bernd Tillack and Dietmar Kissinger}
}
