@article {6345,
	title = {Controlling film growth with selective excitation: Chemical vapor deposition growth of silicon},
	journal = {Applied Physics Letters},
	year = {2004},
	pages = {2175-2177},
	doi = {10.1063/1.1687452},
	author = {Biao Wu and Philip I. Cohen and L.C. Feldman and Zhenyu Zhang}
}
