<?xml version="1.0" encoding="UTF-8"?><xml><records><record><source-app name="Biblio" version="7.x">Drupal-Biblio</source-app><ref-type>10</ref-type><contributors><authors><author><style face="normal" font="default" size="100%">Meng, B</style></author><author><style face="normal" font="default" size="100%">Tang, W</style></author><author><style face="normal" font="default" size="100%">Wang, ZR</style></author><author><style face="normal" font="default" size="100%">Zhang, H. X.</style></author></authors></contributors><titles><title><style face="normal" font="default" size="100%">An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors</style></title><secondary-title><style face="normal" font="default" size="100%">Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on</style></secondary-title></titles><dates><year><style  face="normal" font="default" size="100%">2012</style></year></dates><publisher><style face="normal" font="default" size="100%">IEEE</style></publisher><pages><style face="normal" font="default" size="100%">721-724</style></pages><isbn><style face="normal" font="default" size="100%">1467311243</style></isbn><language><style face="normal" font="default" size="100%">eng</style></language></record></records></xml>