Triboelectrification based active sensor for liquid flow and bubble detetecting - Cheng, Xiao Liang; Miao, Liming; Chen, Haotian; Yu Song; Su, Zongming; Chen, Xuexian; Huan Wang; Zhang, Min; Zhang, Haixia (Micro Electro Mechanical Systems (MEMS), 2017 IEEE 30th International Conference on, 2017)