@proceedings {20175,
	title = {An optimized fabrication of high yield CMOS-compatible silicon carbide capacitive pressure sensors},
	journal = {Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on},
	year = {2012},
	pages = {721-724},
	publisher = {IEEE},
	isbn = {1467311243},
	author = {Meng, B and Tang, W and Wang, ZR and Zhang, H. X.}
}
